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Single Crystal Furnace
Single Crystal Furnace

Ferrotec (China) Single Crystal Furnace

In the condition of noble gas, the single crystal furnace is the equipment for melting polycrystalline material as polycrystalline silicon which is stored in a quartz crucible, using graphite heater. Then the seed will be placed into the liquid silicon to grow single crystal without dislocation by Czochralski process. It can control the overall charging amount and fully automatic crystal pulling process. Comprehensive digital management and centralized control system reduce the influence of human factors and ensure quality stability.
Models
The semiconductor single crystal furnace is independently developed by Ferrotec (China). It adopts gantry frame structure which has good stability and rigidity. The drive unit has electric and pneumatic modes, and self-lubricating bearings are used to avoid grease pollution. It uses fully automatic control for the crystal pulling process and embeds a crystal-pulling control system. Integrated power device uses ultra-low resistivity single crystal mass production technology and the superconductor magnetic field is also used. Ferrotec (China) single crystal furnace is capable of pulling 8/12 inch ingot. Different types of single crystal furnaces have deviations on many aspects like operating efficiency and mechanical structure, etc.
PV Grade Single Crystal Furnace FT-CZ1200PV
PV Grade Single Crystal Furnace FT-CZ1200PV
Silicon Materials Grade Single Crystal Furnace FT-CZ1200Si/1400Si
Silicon Materials Grade Single Crystal Furnace FT-CZ1200Si/1400Si
Semiconductor Grade Single Crystal Furnace FT-CZ1200SE/1400SE
Semiconductor Grade Single Crystal Furnace FT-CZ1200SE/1400SE
Humanized design
Humanized design
Easy to manage, operate and maintain
Easy to manage, operate and maintain
Automatic, Safe and Uniform
Automatic, Safe and Uniform
Stable and Clean
Stable and Clean
Advantages of Ferrotec (China) Single Crystal Furnace
Stable and Clean; Automatic, Safe and Uniformity; Easy to manage, operate and maintain; Humanized design. Welding process is compliant with Japan JIS standard. The flexible design has double explosion-proof safety factor, and a safety relief valve and a lifting explosion-proof system are especially added. The remote control can achieve centralized monitoring and management of multiple devices. The operation parameters and man-machine interface touch screen can be displayed and modified in real time.
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單晶爐參數(shù)
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Tel: 021-36160062
Tel: 021-36160062
Matrix diagram of applications in various fields
Semiconductor correlation
Single Crystal Furnace

Semiconductor manufacturing process；
Production base