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Ferrotec series products: Si Fusion Furnace ware and Precision Silicon Parts

Ferrotec (China) Si Fusionand Si Parts products provide ideal silicon furnace ware and silicon parts for etcher which helps improve metal contamination, reduce slip and particle. We focus on manufacturing silicon boats, pedestal and injectors for wafer high temperature process and LPCVD process. We also provide silicon focus rings and showerheads for etching process.

The Si Fusion products

The Si Fusion products are used for wafer annealing, RTP, CVD process, etc. The silicon boats have the same physical property of wafer, especial same hardness, CET and thermal conductivity, which help reduce slip, backside scratches by FerroTec’s proprietary design based how to solve customer’s current problems.

Long Finger Boat

Designed for diffusion furnace processes, Si Fusion polysilicon boats represent a high-purity, high-performance replacement technology for existing quartz and silicon carbide fixtures. They are critical to the elimination of particles and crystallographic slip. Si Fusion boat is an essential tool for new IC architectures achieve better yield.

Short Finger Boat

At the same time, we can produce auxiliary products such as injector, pedestal and inner tube for furnaces.

Horizontal Boat

Injector

Pedestal

Baffle Wafer

Silicon Parts

Ferrotec (China) precision silicon products use Wacker of Germany and Floatzone of REC semiconductor grade in the United States. They are manufactured into various types of silicon components, providing customers with more advantages in capacity utilization, production efficiency and output.

Focus Ring

We mainly provides focus rings for wafers of 8 inch-12 inch. Focus rings of different sizes and surface requirements can be processed according to customer’s requirement. Focus rings are applied to dry etching process. We own the advantage of material cost, precision machining and cleaning capability and delivery time.

Showerhead

The main specifications are 8 inches and 12 inches. Different size holes can be drilled according to customer requirements. It is used for dry etching systems. We integrate the technology of silicon ingot pulling, precision machining and cleaning which enable us to provide high purity and particle-free showerhead with competitive price.

Other Silicon Machining Parts

We can provide per customer’s requirement discs, silicon plates, seed rods and other products which are mainly used in special fields of semiconductor processes.

Silicon Ingots

Single silicon ingots: We provide silicon ingots of diameters at 120-450mm with resistivity ranges at <0.1ohm-cm,1-5ohm-cm and 60-90ohm-cm.The main application for these materials are manufacturing etching parts like focus rings, showerhead and so on.

Proprietary Technology

Reduce Damage

Extend Lifetime

Extend Cleaning Cycle

Ferrotec precision silicon parts advantages

Using proprietary technology and ultra-pure Single/Polycrystalline silicon material； Reduce wafer backside scratch, reduce slip and particles； Effectively extend routine cleaning cycle（PM）； Extend lifetime and improve the wafer yield.

Matrix diagram of applications in various fields

Display

Optical Fiber Communication

Power Electrons

EV/High-speed Train

Home/Medical Appliance

Other Industry

Semiconductor correlation

Si Fusion and Si Parts

Semiconductor process oxidation, annealing, CVD and other process equipment;

Dry etching process equipment of semiconductor silicon wafer;

Wafer substrate production and silicon semiconductor equipment consumable manufacturing;