Founded Surface Treatment Division

Successfully developed and mass-produced 350nm line-width semiconductor PVD, CVD parts cleaning process and began to 

develop semiconductor ETC parts cleaning process

Successfully developed and mass-produced 250nm line-width semiconductor PVD, CVD, ETC parts cleaning process. Established 

an independent laboratory to develop more advanced cleaning process for semiconductors. Started research and development of 

DIF and LIT parts cleaning process

Started cleaning of TFT parts, successfully developed and standardized the cleaning process of the machine parts of 

semiconductor departments

Provided parts cleaning services for a number of semiconductor and TFT factories, and improved the cleaning process of TFT parts

Established the first subsidiary----- Ferrotec (Tianjin) Technology Co., Ltd

Successfully mass-produced cleaning technology of 45nm line width semiconductor process parts and 8.5 generation line TFT parts

Established the second subsidiary---- Ferrotec (Sichuan) Technology Co., Ltd., successfully developed and mass-produced 28nm 

line width semiconductor process parts cleaning technology

The third subsidiary---- Ferrotec (Dalian) Technology Co., Ltd. formally put into production, research and development and

 mass production of 10.5 generation LCD parts cleaning process; improved ceramic spray process and put into mass production, 

started research and development the 6th generation OLED parts cleaning process, began to develop semiconductor 16nm 

parts cleaning process

The prototype of the surface treatment analysis laboratory of Dalian Plant was established, and the high-tech equipment such 

as ultrasonic tomography microscope, CMM, He detector, potentiometric titrator, LPC and ICP MS were put into operation.And 

established high-purity quartz line